Mitutoyo Laser Hologage Series 542

Mitutoyo Laser Hologage Series 542

FEATURES:

The Mitutoyo Laser Hologage is a high-end digital gaging system that employs diffracted laser beam interference to make highly accurate and repeatable measurements. It features ultra-fine diffraction gratings which are holographically recorded on the scale. The Laser Hologage is suitable for measuring ultra-high precision parts, especially those in semiconductor and related industries

• Excellent measuring stability — the design is also highly resistant to unfavorable environmental conditions such as air movement and atmospheric pressure changes.
• Highly accurate measurement due to an ultra-high resolution of 0.00001mm (0.01μm), which is close to the performance of laser interferometers.
• High-precision linear ball bearings are used in the guide for extremely smooth movement and exceptional durability.
• A display unit is provided.

Technical Data
Accuracy: Refer to the list of specifications.
Resolution: 0.01µm
Length standard: Laser-hologram measurement sensor
Max. Response speed: 250mm/s
Contact point: R5mm carbide
Stem: Ø15mm
Bearing type: High precision linear ball bearing
Measuring force: Refer to the list of specifications
Output signal: 90º phase difference, two-phase sine wave
Signal pitch: 0.25μm
Cable Length: 80”/2m

Order No	542-925A	542-926A
Range	4in 10mm	4in 10mm
Accuracy	0.1µm	0.1µm
Force	0.55N/0.45N/0.35N	0.1N
Stem Dia	15mm	15mm
Remarks		Low measuring force